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The Fischer-Tropsch (FT) reaction converts synthesis gas (syngas) to liquid hydrocarbons using an iron-based catalyst, catalyst that can be coated on a variety of materials such as silica-alumina or titania. The FT catalytic reaction is shown in equation (1) below:4H2+2 CO→C5+3H2O (1)
The Fischer-Tropsch reaction is still based on a catalytic reaction. The reaction is an equilibrium reaction and two out of the three reaction products are always by-products. As a result, the Fischer-Tropsch reaction tends to generate light hydrocarbons of C5 and lower molecular weights. In addition, the Fischer-Tropsch reaction produces some undesirable side reactions, such as the decomposition of paraffins and the polymerization of olefins to polymerize to form waxes and coke.
A number of U.S. patents disclose processes for the conversion of a mixture of carbon monoxide and hydrogen to hydrocarbons. These patents include U.S. Pat. Nos. 2,651,483; 3,271,418; 3,905,815; 4,039,477; 4,117,024; 4,206,082; 4,325,835; 4,434,188; 4,447,622; 4,472,478; 4,528,337; 4,629,742; 4,663,712; 4,727,212; 4,731,372; 4,898,852; 4,912,254; 5,030,566; 5,120,691; 5,170,817; 5,399,636; 5,498,729; 5,502,144; 5,514,253; 5,527,728
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Macronix Unicom F5RUE-01/03/30 U.S. Serial Number Microchip F5U3 – Manual Download Is a handy guide to help you understand and use the procedures. The methods and program are used in a wide range of applications./**
*
*/
package uk.co.jemos.podam.mapping;
import uk.co.jemos.podam.format.SequenceFormat;
/**
* @author Keith, Michael
*/
public class SequenceFormatExtractor {
/**
* @param sequenceFormat
* @return
*/
public SequenceFormatExtractor extractFormatFromSequenceFormat(SequenceFormat sequenceFormat) {
if (sequenceFormat.getSequence()!= null) {
return new FixedSequenceFormatExtractor(sequenceFormat);
} else {
return new NoSequenceFormatExtractor(sequenceFormat);
}
}
}
1. Field of the Invention
The present invention relates to a method of fabricating a semiconductor device, and more particularly, to a method of fabricating a semiconductor device with reduced leakage current characteristics.
2. Description of the Related Art
In semiconductor device manufacturing process, the isolation between devices is usually accomplished by a shallow trench isolation (STI) process. In the STI process, a pad oxide layer and a nitride layer are formed over a semiconductor substrate as a pad oxide layer and a mask layer, respectively, and trenches are formed in the semiconductor substrate by etching the semiconductor substrate through a photolithography process using a photoresist layer. The pad oxide layer and the photoresist layer are removed by an ashing process performed using a mixture of O3 and H2O. An oxide layer is formed over the semiconductor substrate in the trenches formed
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